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Proceedings Paper

Measurements of linear sizes of relief elements in the nanometer range using a scanning electron microscope
Author(s): V. P. Gavrilenko; M. N. Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

We present results of the study of forming the image in a scanning electron microscope (SEM). The effects of the electron beam energy and of the beam diameter on the signal profile are demonstrated. Methods of SEM calibration including the measurement of the electron beam diameter are presented. The formulas relating the size of the trapezoidal structures to the length of the reference portions of the SEM signals are presented. Examples of measurements of linear sizes of relief structures are given.

Paper Details

Date Published: 10 September 2007
PDF: 12 pages
Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480T (10 September 2007); doi: 10.1117/12.733566
Show Author Affiliations
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
M. N. Filippov, N.S. Kurnakov Institute of General and Inorganic Chemistry (Russia)
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)


Published in SPIE Proceedings Vol. 6648:
Instrumentation, Metrology, and Standards for Nanomanufacturing
Michael T. Postek; John A. Allgair, Editor(s)

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