Share Email Print
cover

Proceedings Paper

Holographic fabrication of photonic nanostructures for optofluidic integration
Author(s): Seung-Kon Lee; Sung-Gyu Park; Ji-Hwan Kang; Jun Hyuk Moon; Seung-Man Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Holographic lithography is one of the promising techniques that can create three-dimensional (3D) periodic nanostructures without extensive lithography and etching steps. This proceeding discusses novel hybrid lithographic methods based on the holographic lithography in conjunction with photolithography to generate hierarchically-patterned structures. Using various types of photoresists including positive, negative and hydrogel, we fabricated 3D nanopatterns by holographic lithography. Then, two-dimensional (2D) photolithography was combined to pattern the 3D structures. Eventually, we created a microfluidic channel with 3D periodic patterns. Since the 3D structure possess photonic bandgap properties as well as interconnected pore networks, this kind of microfluidic channel can be applied to optical sensors, mixers and filters.

Paper Details

Date Published: 11 September 2007
PDF: 8 pages
Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66451G (11 September 2007); doi: 10.1117/12.733562
Show Author Affiliations
Seung-Kon Lee, Korea Advanced Institute of Science and Technology (South Korea)
Sung-Gyu Park, Korea Advanced Institute of Science and Technology (South Korea)
Ji-Hwan Kang, Korea Advanced Institute of Science and Technology (South Korea)
Jun Hyuk Moon, Samsung Advanced Institute of Technology (South Korea)
Seung-Man Yang, Korea Advanced Institute of Science and Technology (South Korea)


Published in SPIE Proceedings Vol. 6645:
Nanoengineering: Fabrication, Properties, Optics, and Devices IV
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

© SPIE. Terms of Use
Back to Top