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Proceedings Paper

Measurements of linear sizes of relief elements in the nanometer range using an atomic force microscope
Author(s): P. A. Todua; M. N. Filippov; V. P. Gavrilenko; Yu. A. Novikov; A. V. Rakov
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Paper Abstract

The results of the study of image formation in atomic force microscope (AFM) are presented. Effects of the radius and the angular characteristics of the cantilever tip, as well as of the relief of the surface being studied, on the signal shape are discussed. Methods of AFM calibration, including the calibration of all three scales with the use of only one certified size of a test object and the measurement of the cantilever tip radius, are presented. Formulas are obtained that relate the sizes of trapezoidal structures to the sizes of the control intervals chosen in the AFM signals.

Paper Details

Date Published: 10 September 2007
PDF: 12 pages
Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480S (10 September 2007); doi: 10.1117/12.733520
Show Author Affiliations
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)
M. N. Filippov, N.S. Kurnakov Institute of General and Inorganic Chemistry (Russia)
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 6648:
Instrumentation, Metrology, and Standards for Nanomanufacturing
Michael T. Postek; John A. Allgair, Editor(s)

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