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Proceedings Paper

Si wire waveguide devices
Author(s): T. Watanabe; K. Yamada; T. Tsuchizawa; H. Fukuda; H. Shinojima; S. Itabashi
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Paper Abstract

This paper presents our recent progress in the development of a Si wire waveguiding system for microphotonics devices. We have developed function devices that integrate several fundamental components and confirmed that they exhibited excellent characteristics due to the accuracy of the Si microfabrication. The propagation loss of the waveguide is less than 1.2dB/cm, and branching devices and basic filters show good characteristics. Using the fundamental microfabrication technique, we have developed other passive and dynamic functional devices. As an example of our recent advances using passive devices, we present a polarization diversity system consisting of a separator and a rotator. As a component of a dynamic functional device, we show a low-loss rib-type silicon wire waveguide with low-impedance p-i-n structure and its optical attenuation characteristics.

Paper Details

Date Published: 10 September 2007
PDF: 10 pages
Proc. SPIE 6775, Active and Passive Optical Components for Communications VII, 67750K (10 September 2007); doi: 10.1117/12.733512
Show Author Affiliations
T. Watanabe, NTT Microsystem Integration Labs. (Japan)
K. Yamada, NTT Microsystem Integration Labs. (Japan)
T. Tsuchizawa, NTT Microsystem Integration Labs. (Japan)
H. Fukuda, NTT Microsystem Integration Labs. (Japan)
H. Shinojima, NTT Microsystem Integration Labs. (Japan)
S. Itabashi, NTT Microsystem Integration Labs. (Japan)


Published in SPIE Proceedings Vol. 6775:
Active and Passive Optical Components for Communications VII
Achyut Kumar Dutta; Yasutake Ohishi; Niloy K. Dutta; Andrei V. Lavrinenko, Editor(s)

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