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Proceedings Paper

Flexible Bragg reflection waveguide devices fabricated on a plastic substrate
Author(s): Kyung-Jo Kim; Jeong-Ah Yi; Min-Cheol Oh; Young-Ouk Noh; Hyung-Jong Lee
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Paper Abstract

Bragg reflecting waveguide devices are fabricated on a flexible substrate by using a post lift-off process in order to provide highly uniform grating patterns on a wide range. In this process, the flexible substrate spin-coated on silicon wafer is released after the final fabrication process of chip dicing. The fabricated flexible Bragg reflector shows very sharp transmission spectrum with 3-dB bandwidth of 0.1 nm and 10-dB bandwidth of 0.4 nm, which proves the Bragg reflector has excellent uniformity. To achieve athermal operation of the flexible Bragg reflector, thermal expansion property of the plastic substrate is controlled by the thickness of two polymer materials constructing the plastic substrate. The flexible substrate with 0.7-μm SU-8 layers sandwiching 100-μm NOA61 layer provides an optimized thermal expansion property to compensate the thermo-optic effect of the waveguide made of ZPU polymer. The temperature dependence of the Bragg reflector is decreased to -0.011 nm/°C through the incorporation of the plastic substrate.

Paper Details

Date Published: 11 September 2007
PDF: 7 pages
Proc. SPIE 6645, Nanoengineering: Fabrication, Properties, Optics, and Devices IV, 66451W (11 September 2007); doi: 10.1117/12.733470
Show Author Affiliations
Kyung-Jo Kim, Pusan National Univ. (South Korea)
Jeong-Ah Yi, Pusan National Univ. (South Korea)
Min-Cheol Oh, Pusan National Univ. (South Korea)
Young-Ouk Noh, ChemOptics (South Korea)
Hyung-Jong Lee, ChemOptics (South Korea)


Published in SPIE Proceedings Vol. 6645:
Nanoengineering: Fabrication, Properties, Optics, and Devices IV
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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