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Proceedings Paper

High spatial resolution full-field microscopy using a desktop-size soft x-ray laser
Author(s): Courtney A. Brewer; Fernando Brizuela; Dale Martz; Georgiy Vaschenko; Mario C. Marconi; Weilun Chao; Erik H. Anderson; David T. Attwood; Alexander V. Vinogradov; Igor A. Artioukov; Yuriy P. Pershyn; Valeriy V. Kondratenko; Jorge J. Rocca; Carmen S. Menoni
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Paper Abstract

Images with nanoscale resolution were obtained in both transmission and reflection modes using a full-field microscope that is illuminated by an extremely compact λ = 46.9 nm (hν; = 26.4 eV) soft x-ray laser. The microscope was used to image the surface of partially processed silicon semiconductor chips containing periodic patterns of polysilicon and metal lines. To characterize the microscope, modulation transfer functions were experimentally built for three different objective zone plates, and images with near-wavelength resolution were obtained.

Paper Details

Date Published: 12 October 2007
PDF: 7 pages
Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020M (12 October 2007); doi: 10.1117/12.733422
Show Author Affiliations
Courtney A. Brewer, Colorado State Univ. (United States)
Fernando Brizuela, Colorado State Univ. (United States)
Dale Martz, Colorado State Univ. (United States)
Georgiy Vaschenko, Colorado State Univ. (United States)
Mario C. Marconi, Colorado State Univ. (United States)
Weilun Chao, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
David T. Attwood, Lawrence Berkeley National Lab. (United States)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russia)
Igor A. Artioukov, P.N. Lebedev Physical Institute (Russia)
Yuriy P. Pershyn, National Technical Univ. (Ukraine)
Valeriy V. Kondratenko, National Technical Univ. (Ukraine)
Jorge J. Rocca, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)

Published in SPIE Proceedings Vol. 6702:
Soft X-Ray Lasers and Applications VII
Gregory J. Tallents; James Dunn, Editor(s)

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