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Proceedings Paper

Nanoscale ablation with soft x-ray lasers
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Paper Abstract

We have demonstrated ablation of holes with diameter as small as 82 nm in polymethyl methacrylate (PMMA) by focusing the output of a capillary discharge soft x-ay laser with a Fresnel zone plate. We also report the first demonstration of laser induced breakdown spectroscopy with soft x-ray laser light.

Paper Details

Date Published: 12 October 2007
PDF: 7 pages
Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020L (12 October 2007); doi: 10.1117/12.733401
Show Author Affiliations
Fernando Brizuela, Colorado State Univ. (United States)
Herman Bravo, Colorado State Univ. (United States)
Georgiy Vaschenko, Colorado State Univ. (United States)
Mark Berrill, Colorado State Univ. (United States)
Benjamin Langdon, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)
Oscar Hemberg, JMAR Technologies, Inc. (United States)
Scott Bloom, JMAR Technologies, Inc. (United States)
Weilun Chao, Lawrence Berkeley National Lab. (United States)
Univ. of California, Berkeley (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
Univ. of California, Berkeley (United States)
David T. Attwood, Lawrence Berkeley National Lab. (United States)
Univ. of California, Berkeley (United States)
Jorge J. Rocca, Colorado State Univ. (United States)


Published in SPIE Proceedings Vol. 6702:
Soft X-Ray Lasers and Applications VII
Gregory J. Tallents; James Dunn, Editor(s)

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