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Proceedings Paper

Theoretical and experimental investigation of soft x-rays emitted from TIN plasmas for lithographic application
Author(s): Pinar Demir; Elif Kacar; Erhan Akman; Sinan Kadri Bilikmen; Arif Demir
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Paper Abstract

Extreme ultraviolet lithography (EUVL) requires an emission of soft x-rays around a wavelength region of 13.5 nm. EHYBRID simulation was made under the laser operation at 1064 nm with a pulse duration of 6 ns. Intensity was changed between 1 x 10 12 W/cm2 and 5 x 10 12 W/cm2. Soft X-rays emitted from Sn XII and Sn XIII ions were simulated by using the EHYBRID code. Ion fractions of the tin ions and the line intensities for different electron temperatures were calculated by using the collisional radiative code NeF.

Paper Details

Date Published: 17 September 2007
PDF: 9 pages
Proc. SPIE 6703, Ultrafast X-Ray Sources and Detectors, 67030B (17 September 2007); doi: 10.1117/12.733149
Show Author Affiliations
Pinar Demir, Middle East Technical Univ. (Turkey)
Elif Kacar, Univ. of Kocaeli (Turkey)
Erhan Akman, Univ. of Kocaeli (Turkey)
Sinan Kadri Bilikmen, Middle East Technical Univ. (Turkey)
Arif Demir, Univ. of Kocaeli (Turkey)

Published in SPIE Proceedings Vol. 6703:
Ultrafast X-Ray Sources and Detectors
Zenghu Chang; George A. Kyrala; Jean-Claude Kieffer, Editor(s)

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