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Proceedings Paper

Silicon test object of the linewidth of the nanometer range for SEM and AFM
Author(s): Yu. A. Novikov; V. P. Gavrilenko; Yu. V. Ozerin; A. V. Rakov; P. A. Todua
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Paper Abstract

The results of the study of a test object on scanning electron microscopes and atomic force microscopes are presented. The test object presents a relief on a monosilicon surface, and it is fabricated by the anisotropic etching of monosilicon. The relief elements have a trapezoidal profile with large angles of inclination of the sidewalls. The sides of the relief elements coincide with the crystallographic planes {100} and {111} of silicon. The test object is intended for calibration of scanning electron microscopes and atomic force microscopes.

Paper Details

Date Published: 10 September 2007
PDF: 11 pages
Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480R (10 September 2007); doi: 10.1117/12.733134
Show Author Affiliations
Yu. A. Novikov, A.M. Prokhorov General Physics Institute (Russia)
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russia)
Yu. V. Ozerin, Mikron Corp. (Russia)
A. V. Rakov, A.M. Prokhorov General Physics Institute (Russia)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russia)


Published in SPIE Proceedings Vol. 6648:
Instrumentation, Metrology, and Standards for Nanomanufacturing
Michael T. Postek; John A. Allgair, Editor(s)

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