Share Email Print

Proceedings Paper

Tabletop soft x-ray holography with sub-200-nm spatial resolution
Author(s): P. W. Wachulak; R. A. Bartels; C. S. Menoni; J. J. Rocca; M. C. Marconi
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Sorf X-ray (SXR) Gabor's holograms recorded with a highly coherent table top λ = 46.9 nm laser were obtained with different numerical apertures yielding a spatial resolution of 164 nm. The holograms were recorded in a high resolution photoresist and digitized with an atomic force microscope. A detailed wavelet decomposition and correlation method was developed to assess the spatial resolution achieved in the numerical reconstruction of the holograms.

Paper Details

Date Published: 11 October 2007
PDF: 6 pages
Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020J (11 October 2007); doi: 10.1117/12.732904
Show Author Affiliations
P. W. Wachulak, Colorado State Univ. (United States)
R. A. Bartels, Colorado State Univ. (United States)
C. S. Menoni, Colorado State Univ. (United States)
J. J. Rocca, Colorado State Univ. (United States)
M. C. Marconi, Colorado State Univ. (United States)

Published in SPIE Proceedings Vol. 6702:
Soft X-Ray Lasers and Applications VII
Gregory J. Tallents; James Dunn, Editor(s)

© SPIE. Terms of Use
Back to Top