Share Email Print
cover

Proceedings Paper

Flat-field calibration of CCD detector for long trace profiler
Author(s): Jonathan L. Kirschman; Edward E. Domning; Keith D Franck; Steven C. Irick; Alastair A. MacDowell; Wayne R. McKinney; Gregory Y. Morrison; Brian V. Smith; Tony Warwick; Valeriy V. Yashchuk
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

The next generation of synchrotrons and free electron lasers requires x-ray optical systems with extremely high-performance, generally, of diffraction limited quality. Fabrication and use of such optics requires highly accurate metrology. In the present paper, we discuss a way to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used at synchrotron facilities to characterize x-ray optics at high-spatial-wavelengths from approximately 2 mm to 1 m. One of the major sources of LTP systematic error is the detector. For optimal functionality, the detector has to possess the smallest possible pixel size/spacing, a fast method of shuttering, and minimal nonuniformity of pixel-to-pixel photoresponse. While the first two requirements are determined by choice of detector, the non-uniformity of photoresponse of typical detectors such as CCD cameras is around 2-3%. We describe a flat-field calibration setup specially developed for calibration of CCD camera photo-response and dark current with an accuracy of better than 0.5%. Such accuracy is adequate for use of a camera as a detector for an LTP with performance of ~0.1 microradian (rms). We also present the design details of the calibration system and results of calibration of a DALSA CCD camera used for upgrading our LTP-II instrument at the ALS Optical Metrology Laboratory.

Paper Details

Date Published: 20 September 2007
PDF: 11 pages
Proc. SPIE 6704, Advances in Metrology for X-Ray and EUV Optics II, 67040J (20 September 2007); doi: 10.1117/12.732618
Show Author Affiliations
Jonathan L. Kirschman, Lawrence Berkeley National Lab. (United States)
Edward E. Domning, Lawrence Berkeley National Lab. (United States)
Keith D Franck, Lawrence Berkeley National Lab. (United States)
Steven C. Irick, Lawrence Berkeley National Lab. (United States)
Alastair A. MacDowell, Lawrence Berkeley National Lab. (United States)
Wayne R. McKinney, Lawrence Berkeley National Lab. (United States)
Gregory Y. Morrison, Lawrence Berkeley National Lab. (United States)
Brian V. Smith, Lawrence Berkeley National Lab. (United States)
Tony Warwick, Lawrence Berkeley National Lab. (United States)
Valeriy V. Yashchuk, Lawrence Berkeley National Lab. (United States)


Published in SPIE Proceedings Vol. 6704:
Advances in Metrology for X-Ray and EUV Optics II
Lahsen Assoufid; Peter Z. Takacs; Masaru Ohtsuka, Editor(s)

© SPIE. Terms of Use
Back to Top