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Proceedings Paper

Experimental reconstruction for inverse scattering of one-dimensional surfaces
Author(s): Zu-Han Gu; Anting Wang
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Paper Abstract

We have studied the inverse scattering problem as an optimization problem for a 1-D surface. As the input data for our self-adaptation genetic algorithm for surface inversion, the scattered intensity has been measured with the laser BRDF instruments. In addition, the transmission data are collected. The typical reconstruction of inverse scattering for a 1-D random surface is compared with the profile measured by an atomic force microscope (AFM).

Paper Details

Date Published: 10 September 2007
PDF: 9 pages
Proc. SPIE 6672, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III, 66720H (10 September 2007); doi: 10.1117/12.732559
Show Author Affiliations
Zu-Han Gu, Surface Optics Corp. (United States)
Univ. of California, San Diego (United States)
Anting Wang, Surface Optics Corp. (United States)
Univ. of California, San Diego (United States)


Published in SPIE Proceedings Vol. 6672:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
Angela Duparré; Bhanwar Singh; Zu-Han Gu, Editor(s)

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