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Proceedings Paper

Micro-optics test bench at the ESRF
Author(s): A. A. Snigirev; R. Hustache; P. Duboc; J.-Y. Massonnat; L. Claustre; P. Van Vaerenbergh; I. Snigireva; M. Grigoriev; V. Yunkin
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Paper Abstract

A versatile instrument capable of high resolution X-ray optics characterization has been implemented at the ESRF. The Micro-Optics Test Bench (MOTB) is installed in EH2 of BM5 and is located 55 meters from the tangent point of a dipole magnet. Substantial gain has been demonstrated in the characterization of microfocusing and imaging optical elements, including diffractive, refractive and reflective optics.

Paper Details

Date Published: 5 October 2007
PDF: 4 pages
Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 670511 (5 October 2007); doi: 10.1117/12.732450
Show Author Affiliations
A. A. Snigirev, European Synchrotron Radiation Facility (France)
R. Hustache, European Synchrotron Radiation Facility (France)
P. Duboc, European Synchrotron Radiation Facility (France)
J.-Y. Massonnat, European Synchrotron Radiation Facility (France)
L. Claustre, European Synchrotron Radiation Facility (France)
P. Van Vaerenbergh, European Synchrotron Radiation Facility (France)
I. Snigireva, European Synchrotron Radiation Facility (France)
M. Grigoriev, Institute of Microelectronics Technology (Russia)
V. Yunkin, Institute of Microelectronics Technology and High Purity Materials (Russia)


Published in SPIE Proceedings Vol. 6705:
Advances in X-Ray/EUV Optics and Components II
Ali M. Khounsary; Christian Morawe; Shunji Goto, Editor(s)

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