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Proceedings Paper

Vanadium oxide-based bolometric infrared spectrometer
Author(s): Jae Chang Yang; Ho Jung; Seong Ho Kong
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Paper Abstract

The proposed micro-spectrometer consists of multi-slit grating and bolometric IR detector array. The grating is used for dispersion of an incident optical radiation into different wavelength components. The grating pattern is made by metal RIE of aluminum deposited on dielectric membrane, which is fabricated over silicon wafer. The IR detector part adopts a resistive bolometer that changes its resistance when a temperature change occurs. Due to the temperature rise by an incident IR ray, the presence of IR can be detected by knowing the resistance change on the bolometer. For the material of resistive bolometer, vanadium oxide is utilized. Vanadium oxide is adopted for resistive bolometer in this work because of its high TCR.

Paper Details

Date Published: 4 October 2007
PDF: 9 pages
Proc. SPIE 6759, Smart Biomedical and Physiological Sensor Technology V, 675905 (4 October 2007); doi: 10.1117/12.732358
Show Author Affiliations
Jae Chang Yang, Kyungpook National Univ. (South Korea)
Ho Jung, Kyungpook National Univ. (South Korea)
Seong Ho Kong, Kyungpook National Univ. (South Korea)


Published in SPIE Proceedings Vol. 6759:
Smart Biomedical and Physiological Sensor Technology V
Brian M. Cullum; D. Marshall Porterfield, Editor(s)

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