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Proceedings Paper

Design and fabrication of gold nanostructures with nanosphere lithography for LSPR applications
Author(s): Xiaodong Zhou; Wolfgang Knoll; Sharon Su Yin Oh; Selven Virasawmy; Li Wei Yen; Nan Zhang
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Paper Abstract

This paper reports the details regarding the design and fabrication of gold nanostructures on glass substrates through nanosphere lithography (NSL) for the application of localized surface plasmon resonance (LSPR), which can be used for biosensors. It is realized through gold film deposition on nanospheres dispersed on a surface and subsequent anisotropic etching. Depending on the gold deposition and etching conditions, a variety of gold nanostructure shapes can be obtained. So far through this method, only 2D nanocrescents are reported. In this paper it is pointed out that both 2D and 3D non-conformal nanostructures can be fabricated, and some 2D and 3D profiles of the obtainable nanostructures are simulated by our programs under various deposition and etching conditions. The fabrication processes of the nanostructures on glass substrates are also reported, and the simulated profiles of such nanostructures coincide well with the experimental results. These results prove that our profile simulation program can realize the design of 2D and 3D nanostructures obtainable by nanosphere lithography, and reduce the effort and cost for achieving optimized nanostructures by experiments in the trial and error stage.

Paper Details

Date Published: 22 September 2007
PDF: 10 pages
Proc. SPIE 6641, Plasmonics: Metallic Nanostructures and Their Optical Properties V, 66411U (22 September 2007); doi: 10.1117/12.732312
Show Author Affiliations
Xiaodong Zhou, Institute of Materials Research and Engineering (Singapore)
Wolfgang Knoll, Institute of Materials Research and Engineering (Singapore)
Sharon Su Yin Oh, Institute of Materials Research and Engineering (Singapore)
Selven Virasawmy, National Univ. of Singapore (Singapore)
Li Wei Yen, Institute of Materials Research and Engineering (Singapore)
Nan Zhang, Institute of Materials Research and Engineering (Singapore)


Published in SPIE Proceedings Vol. 6641:
Plasmonics: Metallic Nanostructures and Their Optical Properties V
Mark I. Stockman, Editor(s)

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