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Proceedings Paper

Interferometer alignment
Author(s): Sen Han
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Paper Abstract

For all of the interferometers, alignment has played a key role in manufacturing them. Alignment goals are reproducible results across systems, easy to use and understand, altering overall mechanical design as little as possible, using the loosest tolerances required to achieve results. This paper describes four typical interferometers and their alignments. They are 1.06um interferometer, 24" large aperture phase shifting interferometer, Ritchey-Common testing and microscope interferometer as well.

Paper Details

Date Published: 21 September 2007
PDF: 8 pages
Proc. SPIE 6676, Optical System Alignment and Tolerancing, 66760B (21 September 2007); doi: 10.1117/12.731134
Show Author Affiliations
Sen Han, Veeco Instruments Inc. (United States)

Published in SPIE Proceedings Vol. 6676:
Optical System Alignment and Tolerancing
José M. Sasian; Mitchell C. Ruda, Editor(s)

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