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Proceedings Paper

Flame spray pyrolysis based nano-structured functional metal oxide layers for gas sensing applications
Author(s): Nicolae Barsan; Lutz Mädler; Udo Weimar
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Paper Abstract

The contribution presents the results obtained in the last years by applying an established aerosol based production technology for metal oxide nanoparticles mainly used in catalysis and filler materials, the so called flame spray pyrolysis (FSP), to gas sensor fabrication. The final achievement of this technology is a fast and clean single step process to fabricate fully functionalized multilayer sensors. This is a substantial progress as it merges the two fundamental processes of producing the sensing material and fabricating the sensing element.

Paper Details

Date Published: 11 October 2007
PDF: 11 pages
Proc. SPIE 6769, Nanosensing: Materials, Devices, and Systems III, 676903 (11 October 2007); doi: 10.1117/12.731110
Show Author Affiliations
Nicolae Barsan, Univ. of Tuebingen (Germany)
Lutz Mädler, Univ. of California, Los Angeles (United States)
Udo Weimar, Univ. of Tuebingen (Germany)

Published in SPIE Proceedings Vol. 6769:
Nanosensing: Materials, Devices, and Systems III
M. Saif Islam; Achyut K. Dutta, Editor(s)

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