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Proceedings Paper

Nanosecond UV laser-induced nanoablation of diamond surface
Author(s): V. V. Kononenko; M. S. Komlenok; V. I. Konov; S. M. Pimenov
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Paper Abstract

Experimental results are reported on the surface nanoablation of diamond single crystal induced by nanosecond pulses (&tgr;=15 ns) of KrF excimer laser (&lgr;=248 nm) at fluence below a graphitization threshold of diamond. The relatively low etching rate (less 1nm/1000 pulses) in this regime has been studied depending on both laser fluence and external experimental conditions (ambient gas and temperature). The photochemical mechanism is proposed to explain the nanoablation of diamond surface.

Paper Details

Date Published: 25 April 2007
PDF: 4 pages
Proc. SPIE 6606, Advanced Laser Technologies 2006, 66060F (25 April 2007); doi: 10.1117/12.729579
Show Author Affiliations
V. V. Kononenko, Natural Sciences Ctr. of General Physics Institute (Russia)
M. S. Komlenok, Natural Sciences Ctr. of General Physics Institute (Russia)
V. I. Konov, Natural Sciences Ctr. of General Physics Institute (Russia)
S. M. Pimenov, Natural Sciences Ctr. of General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 6606:
Advanced Laser Technologies 2006

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