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Proceedings Paper

Differential-phase optical coherence reflectometer for surface profile measurement
Author(s): Huan-Jang Huang; Wen-Chuan Kuo; Sheng-Yi Chang; Chien-Wa Ho; Chien Chou
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Paper Abstract

We developed a novel differential-phase optical coherence reflectometer (DP-OCR) by using a low-coherence light source and integrated with differential phase detection technique on surface profile measurement. In this setup, 2Å on detection of axial displacement was demonstrated. Thus, a localized surface profile was measured precisely by scanning an optical grating surface in this measurement. Moreover, the requirement on equal amplitude of the reference and signal beams of this novel reflectometer is discussed.

Paper Details

Date Published: 11 July 2007
PDF: 8 pages
Proc. SPIE 6627, Optical Coherence Tomography and Coherence Techniques III, 66271K (11 July 2007); doi: 10.1117/12.728591
Show Author Affiliations
Huan-Jang Huang, National Yang-Ming Univ. (Taiwan)
Wen-Chuan Kuo, National Taiwan Normal Univ. (Taiwan)
Sheng-Yi Chang, National Central Univ. (Taiwan)
Chien-Wa Ho, National United Univ. (Taiwan)
Chien Chou, National Yang-Ming Univ. (Taiwan)
National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6627:
Optical Coherence Tomography and Coherence Techniques III
Peter E. Andersen; Zhongping Chen, Editor(s)

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