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Proceedings Paper

Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation
Author(s): Alexander Normatov; Boris Spektor; Joseph Shamir
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Paper Abstract

The interaction of light with nano-scale features is usually associated with rigorous vector modeling or other computation intensive method. It turns out, however, that several interesting cases can be analyzed by a model based on scalar, paraxial operators. Good correspondence was found between this theoretical model and experimental investigation. In our work, the capabilities of scalar, paraxial operator approach are discussed for the cases of Dark beam and Gaussian beam scanning microscopes. Fundamental limitations of the approach are outlined as well. The sensitivity of the Dark beam scanning microscope was compared for the real experimental procedure and the idealized theoretical model which indicated a potential of 1nm sensitivity.

Paper Details

Date Published: 18 June 2007
PDF: 10 pages
Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 661704 (18 June 2007); doi: 10.1117/12.728543
Show Author Affiliations
Alexander Normatov, Technion - Israeli Institute of Technology (Israel)
Boris Spektor, Technion - Israeli Institute of Technology (Israel)
Joseph Shamir, Technion - Israeli Institute of Technology (Israel)

Published in SPIE Proceedings Vol. 6617:
Modeling Aspects in Optical Metrology
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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