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Proceedings Paper

Langmuir probe diagnostics of plasma generated by means of pulsed Nd:YAG laser interaction with Si-based targets
Author(s): Adam Cenian; Miroslaw Sawczak; Gerard Sliwinski
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Paper Abstract

Investigations of laser ablation plume aimed at applications for the SiO nano-film deposition are reported. The plasma formation and propagation through experimental chamber was investigated by means of Langmuir probe. The effects related to plume splitting and acceleration are discussed.

Paper Details

Date Published: 23 January 2007
PDF: 4 pages
Proc. SPIE 6598, Laser Technology VIII: Applications of Lasers, 65980Z (23 January 2007); doi: 10.1117/12.726591
Show Author Affiliations
Adam Cenian, The Szewalski Institute of Fluid-Flow Machinery (Poland)
Miroslaw Sawczak, The Szewalski Institute of Fluid-Flow Machinery (Poland)
Gerard Sliwinski, The Szewalski Institute of Fluid-Flow Machinery (Poland)


Published in SPIE Proceedings Vol. 6598:
Laser Technology VIII: Applications of Lasers

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