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Proceedings Paper

Optical properties of the undoped and SiOx doped DLC films
Author(s): Šarūnas Meškinis; Vitoldas Kopustinskas; Kęstutis Šlapikas; Rimas Gudaitis; Sigitas Tamulevičius; Gediminas Niaura; Veronika Rinnerbauer; Kurt Hingerl
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Paper Abstract

In present study DLC films were deposited by direct ion beam deposition. Hexamethyldisiloxane vapor and hydrogen gas mixture, mixture of the hexamethyldisiloxane with acetylene as well as acetylene gas alone has been used as a source of the hydrocarbons. Optical properties of the synthesized films were investigated by spectroscopic ellipsometry. Structure of the DLC films has been studied by means of the Raman spectroscopy. Effects of the technological deposition parameters such as composition of the gas precursors, ion beam energy, ion beam current density were considered.

Paper Details

Date Published: 25 January 2007
PDF: 7 pages
Proc. SPIE 6596, Advanced Optical Materials, Technologies, and Devices, 65961L (25 January 2007); doi: 10.1117/12.726556
Show Author Affiliations
Šarūnas Meškinis, Kaunas Univ. of Technology (Lithuania)
Vitoldas Kopustinskas, Kaunas Univ. of Technology (Lithuania)
Kęstutis Šlapikas, Kaunas Univ. of Technology (Lithuania)
Rimas Gudaitis, Kaunas Univ. of Technology (Lithuania)
Sigitas Tamulevičius, Kaunas Univ. of Technology (Lithuania)
Gediminas Niaura, Institute of Chemistry (Lithuania)
Veronika Rinnerbauer, Johannes Kepler Univ. of Linz (Austria)
Kurt Hingerl, Johannes Kepler Univ. of Linz (Austria)

Published in SPIE Proceedings Vol. 6596:
Advanced Optical Materials, Technologies, and Devices

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