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Proceedings Paper

The design and fabrication of an optical fiber MEMS pressure sensor
Author(s): Yixian Ge; Ming Wang; Hua Rong; Xuxing Chen
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Paper Abstract

A novel pressure sensor based on Fabry-Perot interferometry and micro-electromechanical system (MEMS) technology is proposed and demonstrated. Basic micro-electromechanical technique has been used to fabricate the pressure sensor. Fabrication process and packaging configuration are proposed. The loaded pressure is gauged by measuring the spectrum shift of the reflected optical signal. The experimental results show that high linear response in the range of 0.2-1.0 Mpa and a reasonable sensitivity of 10.07 nm/MPa (spectrum shift/pressure) have been obtained for this sensor.

Paper Details

Date Published: 5 March 2007
PDF: 7 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659541 (5 March 2007); doi: 10.1117/12.726498
Show Author Affiliations
Yixian Ge, Nanjing Normal Univ. (China)
Ming Wang, Nanjing Normal Univ. (China)
Hua Rong, Nanjing Normal Univ. (China)
Xuxing Chen, Nanjing Normal Univ. (China)

Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III
Yuri N. Kulchin; Jinping Ou; Oleg B. Vitrik; Zhi Zhou, Editor(s)

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