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Proceedings Paper

Method of surface roughness measurement based on interferometry
Author(s): Xi Fang Zhang; Zheng Ping Wang; Yang E. Zhang; Li Hui Wang; Yi Min Zhang
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Paper Abstract

A novel method based on interferometry for measurement of fine surface roughness is proposed, designed and completed. The polarization state of the optical beam in one path is changed utilizing a half wave-plate in this design, avoiding the reversibility of the beam in similar systems previously reported, so that the stability of the system is ensured. A quarter-wave plate is used to make the consistency of the polarization states of the coherent light to obtain the better visibility. The absolute measurement values of the surface roughness are achieved using two concentrical beams scanning the surface. The set-up is simple and easy to be realized. Experiment results show that roughness of Ra=0.012&mgr;m is achieved.

Paper Details

Date Published: 5 March 2007
PDF: 10 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 65952F (5 March 2007); doi: 10.1117/12.726470
Show Author Affiliations
Xi Fang Zhang, Harbin Engineering Univ. (China)
Zheng Ping Wang, Harbin Engineering Univ. (China)
Yang E. Zhang, Harbin Engineering Univ. (China)
Li Hui Wang, Harbin Engineering Univ. (China)
Yi Min Zhang, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III

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