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Proceedings Paper

Theoretical analysis of multiprobe confocal 3-D detection system
Author(s): Hai-yan Li; Zhao-bang Pu
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Paper Abstract

To solve the problem of slow speed in single point scanning confocal measurement, a new way to make 3-D morphology confocal detection by optical fiber beam is presented. In the new system, with the point light source produced by optical fiber array and light intensity information detected by pinhole array, the synchronous scanning of the measured surface is done. Compared to the multi-probe detection system of lens array, the new system has the characteristics of simple structure and low price. Based on the general confocal principle and with Fourier optics theory, the 3-D point spread function of a simple fiber pinhole pair is got. With the matrix operating form, the imaging characteristic of the multi-probe measurement system is analyzed. Meanwhile, the conclusion of theoretical analysis shows the total light distribution of the multi-probe detection system conforms to the multiplication form of each detection light path.

Paper Details

Date Published: 5 March 2007
PDF: 4 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659526 (5 March 2007); doi: 10.1117/12.726451
Show Author Affiliations
Hai-yan Li, Harbin Institute of Technology (China)
Zhao-bang Pu, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III

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