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Proceedings Paper

Realisation of quantitative Makyoh topography using a digital micromirror device
Author(s): Ferenc Riesz; I. E. Lukács; J. P. Makai
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Paper Abstract

Makyoh topography (MT) is an optical characterisation tool for flatness testing of mirror-like surfaces. In MT, the surface is illuminated by a collimated light beam, and the reflected image is detected on a screen placed some distance away from the sample. Because of the focussing/defocussing action of the surface undulaations, the image shows intensity variations related to the sample morphology. In its original form, MT is qualitative only. By inserting a structured mask (e.g., a grid) into the path of the illuminating beam, the surface topography can be calculated by the integration of the gradients obtained by the determination of the displacements of the grid node positions, compared to a reference flat, similarly to a wavefront sensor. A DMD provides an easy and verstile way of realisation of such a structured mask. In this paper, we report on a quantitative MT set-up using a programmed DMD. Possibilities of the realisation of different mask patterns are analysed. The results are compared to interferometry.

Paper Details

Date Published: 18 June 2007
PDF: 8 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160L (18 June 2007); doi: 10.1117/12.726388
Show Author Affiliations
Ferenc Riesz, Research Institute for Technical Physics and Materials Science (Hungary)
I. E. Lukács, Research Institute for Technical Physics and Materials Science (Hungary)
J. P. Makai, Research Institute for Technical Physics and Materials Science (Hungary)


Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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