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Proceedings Paper

Super-heterodyne laser interferometer using femtosecond frequency comb for linear encoder calibration system
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Paper Abstract

A super-heterodyne laser interferometer for sub-nanometer length measurement system is proposed. This interferometer has a possibility to realize high resolution by using the self-zooming method and high accuracy by using external cavity diode laser which is stabilized to femtosecond frequency comb(fs-comb) as an optical source. This length measurement system is going to be applied for linear-encoder calibration system for national standards.

Paper Details

Date Published: 18 June 2007
PDF: 6 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66160G (18 June 2007); doi: 10.1117/12.726247
Show Author Affiliations
Mariko Kajima, National Institute of Advanced Industrial Science and Technology (Japan)
Hirokazu Matsumoto, National Institute of Advanced Industrial Science and Technology (Japan)


Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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