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Proceedings Paper

Practical implementation of the complex wavefront modulation model for optical alignment
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Paper Abstract

We discuss the implementation of the complex wavefront modulation model in practical optical alignment procedures and present its interim results. This modulation model describes the relation between the alignment state and the wavefront of a system, both are expressed in mathematical complex quantities. It addresses the importance of the coupled inter-element alignment effect to the resultant system wavefront. We utilise this effect in order to extract the alignment state of a system from measured optical wavefronts. We demonstrate the method's practical applicability to the real optical alignment procedure by showing alignment simulations of a centered three-mirror system.

Paper Details

Date Published: 18 June 2007
PDF: 10 pages
Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170N (18 June 2007); doi: 10.1117/12.726244
Show Author Affiliations
Hanshin Lee, Univ. of Oxford (United Kingdom)
Yonsei Univ. (South Korea)
Gavin B. Dalton, Univ. of Oxford (United Kingdom)
Rutherford Appleton Lab. (United Kingdom)
Ian A. J. Tosh, Rutherford Appleton Lab. (United Kingdom)
Sug-Whan Kim, Yonsei Univ. (South Korea)

Published in SPIE Proceedings Vol. 6617:
Modeling Aspects in Optical Metrology
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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