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Proceedings Paper

Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement
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Paper Abstract

The active Twyman-Green laser interferometer for MEMS measurement equipped with Spatial Light Modulator (SLM) as a reference element is reported. The SLM is electrically addressed, reflective (made in Liquid Crystal on Silicone technology) and phase-only device which allows to actively shape of the reference beam wavefront in the interferometer. The proper use of the SLM in interferometric MEMS measurement is possible after opto-mechanical modification of the interferometer, performed calibration procedures and special interferogram processing. All these aspects are described. The use of such device benefits extension of measurement range and simplification testing procedures. Usefulness of the SLM is shown at the examples of active microelements testing. Advantages and disadvantages of SLM application are described and potential of this device for interferometry is discussed.

Paper Details

Date Published: 18 June 2007
PDF: 11 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66163E (18 June 2007); doi: 10.1117/12.726214
Show Author Affiliations
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)


Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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