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Proceedings Paper

Surface metrology with a stitching Shack-Hartmann profilometric head
Author(s): J. Floriot; X. Levecq; S. Bucourt; M. Thomasset; F. Polack; M. Idir; P. Mercère; S. Brochet; T. Moreno
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Paper Abstract

In this article, a stitching Shack-Hartmann profilometric head is presented. This instrument has been developed to answer improved needs for surface metrology in the domain of short-wavelength optics (X/EUV). It is composed of a highaccuracy Shack-Hartmann wavefront sensor and an illumination platform. This profilometric head is mounted on a translation stage to perform bidimensional mappings by stitching together successive sub-aperture acquisitions. This method ensures the submicroradian accuracy of the system and allows the user to measure large surfaces with a submillimetric spatial resolution. We particularly emphasize on the calibration method of the head; this method is validated by characterizing a super-flat reference mirror. Cross-checked tests with the Soleil's long-trace profiler are also performed. The high precision of profilometric head has been validated with the characterization of a spherical mirror. We also emphasize on the large curvature dynamic range of the instrument with the measurement of an X-ray toric mirror. The instrument, which performs a complete diagnostic of the surface or wavefront under test, finds its main applications in metrology (measurement of large optics/wafers, post-polishing control and local surface finishing for the industry, spatial quality control of laser beam).

Paper Details

Date Published: 18 June 2007
PDF: 12 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162A (18 June 2007); doi: 10.1117/12.726058
Show Author Affiliations
J. Floriot, Imagine Optic (France)
X. Levecq, Imagine Optic (France)
S. Bucourt, Imagine Optic (France)
M. Thomasset, Synchrotron Soleil (France)
F. Polack, Synchrotron Soleil (France)
M. Idir, Synchrotron Soleil (France)
P. Mercère, Synchrotron Soleil (France)
S. Brochet, Synchrotron Soleil (France)
T. Moreno, Synchrotron Soleil (France)

Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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