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Proceedings Paper

Computer and experimental modeling of light scattering at random and fractal surfaces
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Paper Abstract

New feasibilities are considered for optical correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. The possibilities for optical diagnostics of fractal surface structures are shown and the set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimation of these parameters is proposed.

Paper Details

Date Published: 18 June 2007
PDF: 10 pages
Proc. SPIE 6617, Modeling Aspects in Optical Metrology, 66170H (18 June 2007); doi: 10.1117/12.725982
Show Author Affiliations
Oleg V. Angelsky, Chernivtsi National Univ. (Ukraine)
Alexander P. Maksimyak, Chernivtsi National Univ. (Ukraine)
Peter P. Maksimyak, Chernivtsi National Univ. (Ukraine)


Published in SPIE Proceedings Vol. 6617:
Modeling Aspects in Optical Metrology
Harald Bosse; Bernd Bodermann; Richard M. Silver, Editor(s)

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