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Proceedings Paper

Research on surface topography of MEMS micromirror based on 3D Weierstrass-Mandelbrot function
Author(s): Yuan Luo; Yi Zhang; Xiaodong Xu
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Paper Abstract

Micro-mirror is the key structure of MEMS optical switch, Digital Mirror Display (DMD) and variable optical attenuators. Surface roughness plays a crucial rule in reflectivity, insertion loss, and all kinds of surface forces. In this paper, a silicon based non-silicon MEMS optical switch is fabricated and the topographies of various micro-mirror surfaces are measured by Scanning Tunneling Microscope (STM). After fractal analysis, a three-dimensional Weierstrass-Mandelbrot function is applied to simulate the topography of different surfaces. The result shows that the surface of MEMS micromirror which fabricated by metal sputter has low anisotropism and the W-M function is very efficient in creating models and is very useful in analysis the topography of MEMS surface.

Paper Details

Date Published: 29 January 2007
PDF: 6 pages
Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62797A (29 January 2007); doi: 10.1117/12.725945
Show Author Affiliations
Yuan Luo, Chongqing Univ. of Posts and Telecommunications (China)
Yi Zhang, Chongqing Univ. of Posts and Telecommunications (China)
Xiaodong Xu, Chongqing Univ. of Posts and Telecommunications (China)


Published in SPIE Proceedings Vol. 6279:
27th International Congress on High-Speed Photography and Photonics

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