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Proceedings Paper

A new type of dynamic infrared image modulator based on the MEMS technique
Author(s): Fangkui Sun; Chunfei Li; Wei Jiang; Shoutao Zhang; Di Wu; Yingxue Shi
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Paper Abstract

In this paper, we have proposed a new type of DIRIM with suspended membrane resistor (SMR) structure, while mainly focusing on its implementation technology which includes selection of resistance material and fabrication technique of the membrane; design of Read-In-Integrated-Circuit; and implementation of silica-base MEMS process. Some performance parameters of the device are quoted to conclude the advantages of this new type of DIRIM and make an outlook on the key development in the future.

Paper Details

Date Published: 5 March 2007
PDF: 5 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659510 (5 March 2007); doi: 10.1117/12.725719
Show Author Affiliations
Fangkui Sun, Harbin Institute of Technology (China)
Chunfei Li, Harbin Institute of Technology (China)
Wei Jiang, Heilongjiang Bada Universal Semiconductor Inc. (China)
Shoutao Zhang, Heilongjiang Bada Universal Semiconductor Inc. (China)
Di Wu, Heilongjiang Bada Universal Semiconductor Inc. (China)
Yingxue Shi, Heilongjiang Bada Universal Semiconductor Inc. (China)


Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III

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