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Proceedings Paper

Experimental study on femtosecond laser micromaching of grooves in spring steel
Author(s): Litao Qi; Xuefeng Wu; Yang Wang
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Paper Abstract

Experiments on femtosecond laser micromachining of grooves in spring steel (65Mn) were performed with Ti:Sapphire laser pulses of 5Ofs duration. The relationships between the dimensions of the grooves and the cutting parameters were analyzed. A logarithmic dependence of the groove depth on laser fluence was observed with two regimes characterized by different ablation rates and different thresholds. The groove depth was found to be inversely proportional to cutting speed and proportional to the number of passes. A depth limit was found with decreasing cutting speed or increasing number of passes. Cutting speed and the numbers of passes have little effect on the width of grooves. The morphological of period surface structures and unevenness depth was observed using scanning electron microscope. The result in the paper provides instructive guide for future research on three-dimension microstructures.

Paper Details

Date Published: 5 March 2007
PDF: 7 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 65950R (5 March 2007); doi: 10.1117/12.725708
Show Author Affiliations
Litao Qi, Harbin Institute of Technology (China)
Xuefeng Wu, Harbin Institute of Technology (China)
Yang Wang, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III

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