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Proceedings Paper

Nonlinear errors of passive homodyne polarized laser interferometer
Author(s): Jun Yang; Bing Wu; Zhi-hai Liu; Li-bo Yuan
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Paper Abstract

Based on Jones matrices theory, the paper researches the error source and action mechanism of the polarized interferometer in nanometer level measurement. It opens the door for selecting optical component, adjusting light set-up and compensating error. According to the theoretical analysis, the main reason that causes error is degeneration of polarization that the imperfect performance of optical components and imperfect adjusting bring. Especially the different delay angle happens more obviously. The characteristic of the passive homodyne laser interferometer based on the polarized phase-shift is that the output of interferometer is four-channel signals in quadrature. Using this characteristic, through strict selecting and fine adjusting components and differential signal processing, the interferometer can perform nanometer measurement.

Paper Details

Date Published: 5 March 2007
PDF: 8 pages
Proc. SPIE 6595, Fundamental Problems of Optoelectronics and Microelectronics III, 659509 (5 March 2007); doi: 10.1117/12.725695
Show Author Affiliations
Jun Yang, Harbin Engineering Univ. (China)
Bing Wu, Harbin Engineering Univ. (China)
Zhi-hai Liu, Harbin Engineering Univ. (China)
Li-bo Yuan, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 6595:
Fundamental Problems of Optoelectronics and Microelectronics III

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