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Proceedings Paper

Laser interferometry-phasometry of nanodisplacement
Author(s): Zh. Zhelkobaev; V. V. Kalendin; M. A. Samorukov; P. A. Todua
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Paper Abstract

This work presents a conception of metrological support of nanoscaled linear size and displacement measurements, based on laser interferomerty-phasemetry methods. New methods of high-precision laser interferometers calibration with accuracy not lower than 10-10m based on laser phasemetry are announced and practical application of these methods for scanning probe microscopes, used in nanotechnologies is considered.

Paper Details

Date Published: 11 January 2007
PDF: 5 pages
Proc. SPIE 6594, Lasers for Measurements and Information Transfer 2006, 65940A (11 January 2007); doi: 10.1117/12.725603
Show Author Affiliations
Zh. Zhelkobaev, Research Ctr. for Surface and Vacuum Investigation (Russia)
V. V. Kalendin, Research Ctr. for Surface and Vacuum Investigation (Russia)
M. A. Samorukov, Research Ctr. for Surface and Vacuum Investigation (Russia)
P. A. Todua, Research Ctr. for Surface and Vacuum Investigation (Russia)


Published in SPIE Proceedings Vol. 6594:
Lasers for Measurements and Information Transfer 2006

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