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Proceedings Paper

Fiber micro-vibration readout sensor based on MOEMS
Author(s): Rui Li; Wen Xiao; Dewen Liu; Yu Cui
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Paper Abstract

To measure the vibration of micro-structure, a scheme of sensor based on MOEMS (Micro-Optic-Electro-Mechanical System) with fiber-optic readout was proposed, and its mathematical model was deduced. Single-fiber readout structure and a micro-structure fixed in the front of the sensor were used. The micro-structure vibrated as the measured object moved, and its vibration caused the change of light intensity. The sensor detected vibration displacement by receiving the light intensity. As a result of single-fiber structure and parameters optimization of micro-structure, compared with other fiber readout structures, this system has the advantages of high sensitivity and miniaturization which is easier to match with fiber system because of single-fiber structure and parameters optimization of micro-structure. The response behaviors of the system to the piezoelectric ceramics excitation were studied through the experiments. And it could detect the vibration displacement of 0.18nm.

Paper Details

Date Published: 29 January 2007
PDF: 5 pages
Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 627964 (29 January 2007); doi: 10.1117/12.725507
Show Author Affiliations
Rui Li, Beijing Univ. of Aeronautics and Astronautics (China)
Wen Xiao, Beijing Univ. of Aeronautics and Astronautics (China)
Dewen Liu, Beijing Univ. of Aeronautics and Astronautics (China)
Yu Cui, Beijing Univ. of Aeronautics and Astronautics (China)


Published in SPIE Proceedings Vol. 6279:
27th International Congress on High-Speed Photography and Photonics

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