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Proceedings Paper

The measurement of micro-topography surface based on wave cutting interference theory
Author(s): Mei Hui; Nian-mao Deng
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Paper Abstract

This paper proposes the measurement of micro-topography surface based on wave cutting interference theory. This wave cutting interference system realized the differential cutting and complex polarization with beam splitter polarize prism. Math model is established based on matrix analysis. The phase distribution is obtained with equation between intensity and phase from the figure of the light intensity information, the value of micro-topography surface is obtained after data manipulation. Some technical difficulties existed in the surface microscopy are analyzed and solved.

Paper Details

Date Published: 29 January 2007
PDF: 7 pages
Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62794V (29 January 2007); doi: 10.1117/12.725460
Show Author Affiliations
Mei Hui, Beijing Institute of Technology (China)
Nian-mao Deng, Beijing Institute of Control and Electric (China)


Published in SPIE Proceedings Vol. 6279:
27th International Congress on High-Speed Photography and Photonics

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