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Proceedings Paper

A new real-time surface profile measurement using a sinusoidal phase modulating interferometry
Author(s): Guotian He; Xiangzhao Wang; Dailin Li; Jianmin Hu
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Paper Abstract

In this paper, a sinusoidal phase modulating interferometer has been proposed to realize real-time surface profile measurement. And its operation principle has been analyzed theoretically. By analyzing the interference signal through the signal processing circuit, the displacement of each point on the surface can be obtained. The experimental results by using this interferometer to measure a glass plate show the maximum root-mean-square is 5.2nm, and the displacement resolution is up to 5x10-3nm.This method proposed in this paper avoids the complex phase demodulation by computer, has high measurement accuracy, and can be used in the noise circumstance.

Paper Details

Date Published: 29 January 2007
PDF: 6 pages
Proc. SPIE 6279, 27th International Congress on High-Speed Photography and Photonics, 62794J (29 January 2007); doi: 10.1117/12.725393
Show Author Affiliations
Guotian He, Shanghai Institute of Optics and Fine Mechanics (China)
Xiangzhao Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Dailin Li, Shanghai Institute of Optics and Fine Mechanics (China)
Jianmin Hu, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 6279:
27th International Congress on High-Speed Photography and Photonics

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