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Proceedings Paper • Open Access

Front Matter: Volume 6415
Author(s): Proceedings of SPIE

Paper Abstract

This PDF file contains the front matter associated with SPIE Proceedings Volume 6415, including the Title Page, Copyright information, Table of Contents, and the Conference Committee listing.

Paper Details

Date Published: 11 January 2007
PDF: 14 pages
Proc. SPIE 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III, 641501 (11 January 2007); doi: 10.1117/12.724842
Show Author Affiliations
Proceedings of SPIE, SPIE—The International Society for Optical Engineering (United States)


Published in SPIE Proceedings Vol. 6415:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David Victor Thiel, Editor(s)

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