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Proceedings Paper

Uncooled MEMS IR imagers with optical readout and image processing
Author(s): Nickolay Lavrik; Rick Archibald; Dragoslav Grbovic; Slo Rajic; Panos Datskos
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Paper Abstract

MEMS thermal transducers offer a promising technological platform for uncooled IR imaging. We report on the fabrication and performance of a 256x256 MEMS IR FPA based on bimaterial microcantilever. The FPA readout is performed using a simple and efficient optical readout scheme. The response time of the bimaterial microcantilever was <15 ms and the thermal isolation was calculated to be < 4x10-7 W/K. Using these FPAs we obtained IR images of room temperature objects. Image quality is improved by automatic post-processing of artifacts arising from noise and non-responsive pixels. An iterative Curvelet denoising and inpainting procedure is successfully applied to image output. We present our results and discuss the factors that determine the ultimate performance of the FPA. One of the unique advantages of the present approach is the scalability to larger imaging arrays.

Paper Details

Date Published: 8 June 2007
PDF: 8 pages
Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 65421E (8 June 2007); doi: 10.1117/12.724346
Show Author Affiliations
Nickolay Lavrik, Oak Ridge National Lab. (United States)
Univ. of Tennessee (United States)
Rick Archibald, Oak Ridge National Lab. (United States)
Dragoslav Grbovic, Univ. of Tennessee (United States)
Slo Rajic, Oak Ridge National Lab. (United States)
Panos Datskos, Oak Ridge National Lab. (United States)
Univ. of Tennessee (United States)

Published in SPIE Proceedings Vol. 6542:
Infrared Technology and Applications XXXIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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