Share Email Print
cover

Proceedings Paper

Monolithic fully integrated programmable micro-diffraction grating based on electro-optical materials
Author(s): G. G. Bentini; A. Parini; M. Chiarini; M. Bianconi; A. Cerutti; A. Nubile; S. Sugliani; G. Pennestrì; G. Bellanca; S. Trillo; S. Petrini; M. Gallerani; P. De Nicola; F. Bergamini
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

In the last few years Programmable Micro Diffraction Gratings (PMDG) have shown the possibility to be applied in many areas, spanning from imaging, to telecommunication, to spectroscopy. These devices were mainly based on Micro-Electro-Mechanical Systems (MEMS) techniques and realized by moveable mirrors and pop-up structures. Although this approach have held a central stage in Micro-Opto-Electro-Mechanical-Systems (MOEMS), they made the realized devices delicate and not useful for some critical environments. In this work we discuss the possibility to fabricate a fully integrated electrically driven PMDG device where, to avoid the presence of moving parts, the electro-optical properties of a suitable substrate material are used. The theoretical approach and the design procedure of a miniaturized PMDG apparatus useful as a generator of synthetic spectra are illustrated and discussed in details.

Paper Details

Date Published: 12 June 2007
PDF: 9 pages
Proc. SPIE 6593, Photonic Materials, Devices, and Applications II, 659325 (12 June 2007); doi: 10.1117/12.724171
Show Author Affiliations
G. G. Bentini, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
A. Parini, Univ. degli Studi di Ferrara (Italy)
M. Chiarini, Carlo Gavazzi Space S.p.A. (Italy)
M. Bianconi, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
A. Cerutti, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
A. Nubile, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
S. Sugliani, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
G. Pennestrì, Carlo Gavazzi Space S.p.A (Italy)
G. Bellanca, Univ. degli Studi di Ferrara (Italy)
S. Trillo, Univ. degli Studi di Ferrara (Italy)
S. Petrini, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
M. Gallerani, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
P. De Nicola, CNR, Istituto per la Microelettronica e Microsistemi (Italy)
F. Bergamini, CNR, Istituto per la Microelettronica e Microsistemi (Italy)


Published in SPIE Proceedings Vol. 6593:
Photonic Materials, Devices, and Applications II
Ali Serpengüzel; Gonçal Badenes; Giancarlo C. Righini, Editor(s)

© SPIE. Terms of Use
Back to Top