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Proceedings Paper

Optical scan method for fine surface roughness measurement
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Paper Abstract

A method is proposed for smooth surface roughness measurement. Two standard reference surfaces and two polaroids are employed to realize the measurement. The reversibility of the optical beam is overcome by using two quarter-wave plates. Measuring optical set-up is shown. The mathematical expression of the working principle of the method is derived. The uncertainty of the method is theoretically calculated and digitally simulated. Finally, the feasibility of this method is verified by measuring a standard roughness sample. The measurement result is in accordance with the standard value of the sample roughness provided by the manufacturer.

Paper Details

Date Published: 18 June 2007
PDF: 6 pages
Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162K (18 June 2007); doi: 10.1117/12.723727
Show Author Affiliations
Zhengping Wang, Harbin Engineering Univ. (China)
Lihui Wang, Harbin Engineering Univ. (China)


Published in SPIE Proceedings Vol. 6616:
Optical Measurement Systems for Industrial Inspection V
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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