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Proceedings Paper

Miniaturized self-adaptive tuning of MEMS gyroscope for space
Author(s): Didier Keymeulen; Michael I. Ferguson; Luke Breuer; Chris Peay; Boris Oks; Yen Cheng; Dennis Kim; Eric MacDonald; David Foor; Richard Terrile; Nazeeh Arenki; Karl Yee
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Paper Abstract

We propose a tuning method for Micro-Electro-Mechanical Systems (MEMS) gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. We present the results of an experiment to determine the speed and efficiency of an evolutionary algorithm applied to electrostatic tuning of MEMS micro gyros. The MEMS gyro used in this experiment is a pyrex post resonator gyro (PRG) in a closed-loop control system. A measure of the quality of tuning is given by the difference in resonant frequencies, or frequency split, for the two orthogonal rocking axes. The current implementation of the closed-loop platform is able to measure and attain a relative stability in the sub-millihertz range, leading to a reduction of the frequency split to less than 100 mHz.

Paper Details

Date Published: 3 May 2007
PDF: 10 pages
Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655613 (3 May 2007); doi: 10.1117/12.723605
Show Author Affiliations
Didier Keymeulen, Jet Propulsion Lab. (United States)
Michael I. Ferguson, Jet Propulsion Lab. (United States)
Luke Breuer, Jet Propulsion Lab. (United States)
Chris Peay, Jet Propulsion Lab. (United States)
Boris Oks, Jet Propulsion Lab. (United States)
Yen Cheng, Univ of California, Los Angeles (United States)
Dennis Kim, Univ of California, Los Angeles (United States)
Eric MacDonald, Univ. of Texas at El Paso (United States)
David Foor, Univ. of Texas at El Paso (United States)
Richard Terrile, Univ. of Texas at El Paso (United States)
Nazeeh Arenki, Univ. of Texas at El Paso (United States)
Karl Yee, Univ. of Texas at El Paso (United States)


Published in SPIE Proceedings Vol. 6556:
Micro (MEMS) and Nanotechnologies for Defense and Security
Thomas George; Zhongyang Cheng, Editor(s)

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