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Proceedings Paper

17 µm pixel 640 x 480 microbolometer FPA development at BAE Systems
Author(s): Richard J. Blackwell; Tuyet Bach; Dan O'Donnell; Jeannie Geneczko; Michael Joswick
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Paper Abstract

BAE Systems has developed an advanced 640 x 480 focal plane array (FPA) with a 17 &mgr;m pixel pitch. Sensitivity of ≤ 50 mK was demonstrated and the FPAs were used in imaging demonstrations. Successful scaling of BAE Systems' patented single contact per pixel, single-level microbolometer process to 17 &mgr;m pitch provides a path toward next generation microbolometer imaging systems.

Paper Details

Date Published: 14 May 2007
PDF: 4 pages
Proc. SPIE 6542, Infrared Technology and Applications XXXIII, 65421U (14 May 2007); doi: 10.1117/12.723474
Show Author Affiliations
Richard J. Blackwell, BAE Systems (United States)
Tuyet Bach, BAE Systems (United States)
Dan O'Donnell, BAE Systems (United States)
Jeannie Geneczko, BAE Systems (United States)
Michael Joswick, BAE Systems (United States)


Published in SPIE Proceedings Vol. 6542:
Infrared Technology and Applications XXXIII
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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