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Proceedings Paper

Quantitative modelization of particle emission from excited solids: application to spectroscopic diagnostics of buried interfaces in multilayer
Author(s): Nicola Mahne; Angelo Giglia; Stefano Nannarone; Juri Bertoli; Valentina Mattarello; Valentino Rigato
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Paper Abstract

The performance of multilayer optics depends on the quality of interfaces between spacer and absorber materials. Intermixing at the interfaces affects the optical behavior. An experimental method is presented here to obtain the amount of intermixing at the buried interfaces of multilayer structures. The method is based on the combined use of photoemission and a rocking scan through the Bragg peak. The possibility of obtaining quantitative information - through a phenomenological model - on the width of the intermixing region is presented and discussed.

Paper Details

Date Published: 18 May 2007
PDF: 10 pages
Proc. SPIE 6586, Damage to VUV, EUV, and X-ray Optics, 65860V (18 May 2007); doi: 10.1117/12.722922
Show Author Affiliations
Nicola Mahne, CNR-Lab. TASC-INFM (Italy)
Angelo Giglia, CNR-Lab. TASC-INFM (Italy)
Stefano Nannarone, CNR-Lab. TASC-INFM (Italy)
Univ. degli Studi di Modena e Reggio Emilia (Italy)
Juri Bertoli, Lab. Nazionali di Legnaro, INFN, Viale Univ. (Italy)
Media Lario Technologies (Italy)
Valentina Mattarello, Lab. Nazionali di Legnaro, INFN, Viale Univ. (Italy)
Media Lario Technologies (Italy)
Valentino Rigato, Lab. Nazionali di Legnaro, INFN, Viale Univ. (Italy)
Media Lario Technologies (Italy)


Published in SPIE Proceedings Vol. 6586:
Damage to VUV, EUV, and X-ray Optics
Libor Juha; Ryszard H. Sobierajski; Hubertus Wabnitz, Editor(s)

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