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Proceedings Paper

Synthesis of diamond-like carbon films by pulsed laser deposition in a tiny vacuum chamber
Author(s): Jaanus Eskusson; Raivo Jaaniso; Tea Avarmaa; Taavi Jantson; Enn Lust
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Paper Abstract

Diamond like-carbon films were fabricated by pulsed laser ablation of a liquid target (vacuum oil) in a very small (volume below 1 cm3) vacuum chamber, where the film was deposited onto the inner surface of the chamber window. The synthesis was carried out at room temperature using 248 nm KrF excimer laser. The sp3 hybridization carbon formation was additionally promoted by gaseous H2O2 flow through the reaction chamber. Deposited diamond-like carbon films were characterized by Raman scattering spectroscopy, optical and atomic force microscopy. The results indicated that higher sp3 content was present in the film areas exposed to the laser irradiation during the deposition. The surface roughness of these areas was lower compared with that of the non-irradiated areas. Optical microscopy observations indicated that the films had interference-colored regions on laser irradiated areas. These colored regions were significantly different from their surroundings, which were grey or brown. Thus, the interferencecolored regions have very wide band gap (&Dgr;E > 3 eV) and accordingly, high sp3 hybridized carbon content.

Paper Details

Date Published: 16 May 2007
PDF: 9 pages
Proc. SPIE 6591, Nanotechnology III, 65910L (16 May 2007); doi: 10.1117/12.721808
Show Author Affiliations
Jaanus Eskusson, Univ. of Tartu (Estonia)
Raivo Jaaniso, Univ. of Tartu (Estonia)
Tea Avarmaa, Univ. of Tartu (Estonia)
Taavi Jantson, Univ. of Tartu (Estonia)
Enn Lust, Univ. of Tartu (Estonia)

Published in SPIE Proceedings Vol. 6591:
Nanotechnology III
Fernando Briones, Editor(s)

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