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Proceedings Paper

A metal-to-metal contact RF MEMS switch towards handsets applications
Author(s): Tauno Vähä-Heikkilä; Pekka Rantakari
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Paper Abstract

A MEMS switch for radio frequency applications has been designed, fabricated, and characterized. The focus has been in the optimization of switch performance towards handset applications. The realized switch has actuation voltage less than 15 V for realizing a good metal-to-metal contact. Measured results show loss less than 0.25 dB up to 10 GHz with matching better than -30 dB in the down-state, and isolation better than -20 dB up to 6 GHz in the up-state.

Paper Details

Date Published: 15 May 2007
PDF: 5 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65890Y (15 May 2007); doi: 10.1117/12.721582
Show Author Affiliations
Tauno Vähä-Heikkilä, VTT Technical Research Ctr. of Finland (Finland)
Pekka Rantakari, VTT Technical Research Ctr. of Finland (Finland)


Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)

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