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Proceedings Paper

DLC/TiNi microcage for biopsy applications
Author(s): Y. Q. Fu; J. K. Luo; S. Ong; S. Zhang; A. J. Flewitt; W. I. Milne
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Paper Abstract

A TiNi/diamond-like-carbon (DLC) microcage for biological application has been designed, fabricated and characterized. A compressively stressed DLC film with TiNi pattern on top lifts the fingers upwards once they are released from the substrate, and the microcage can be closed through shape memory effect of top TiNi film with temperature below 80°C. Further heating above 100°C, the gradual opening of the microcage can be obtained due to thermal bimorph effect. The biocompatibility of both the TiNi and DLC films has been proved using a cell-culture method.

Paper Details

Date Published: 15 May 2007
PDF: 7 pages
Proc. SPIE 6589, Smart Sensors, Actuators, and MEMS III, 65891C (15 May 2007); doi: 10.1117/12.721564
Show Author Affiliations
Y. Q. Fu, Univ. of Cambridge (United Kingdom)
J. K. Luo, Univ. of Cambridge (United Kingdom)
S. Ong, Nanyang Technological Univ. (Singapore)
S. Zhang, Nanyang Technological Univ. (Singapore)
A. J. Flewitt, Univ. of Cambridge (United Kingdom)
W. I. Milne, Univ. of Cambridge (United Kingdom)


Published in SPIE Proceedings Vol. 6589:
Smart Sensors, Actuators, and MEMS III
Thomas Becker; Carles Cané; N. Scott Barker, Editor(s)

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