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Proceedings Paper

Complex MEMS device: microshutter array system for space applications
Author(s): Mary J. Li; Tomoko Adachi; Christine Allen; Sachi Babu; Sateesh Bajikar; Michael Beamesderfer; Ruth Bradley; Kevin Denis; Nick Costen; Audrey Ewin; Dave Franz; Larry Hess; Ron Hu; Kamili Jackson; Murzy Jhabvala; Dan Kelly; Todd King; Gunther Kletetschka; Alexander Kutyrev; Barney Lynch; Timothy Miller; Harvey Moseley; Vilem Mikula; Brent Mott; Lance Oh; James Pontius; Dave Rapchun; Chris Ray; Knute Ray; Eric Schulte; Scott Schwinger; Peter Shu; Robert Silverberg; Wayne Smith; Steve Snodgrass; David Sohl; Leroy Sparr; Rosalind Steptoe-Jackson; Veronica Valeriano; Liqin Wang; Yun Zheng; Chris Zincke
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Paper Abstract

A complex MEMS device, microshutter array system, is being developed at NASA Goddard Space Flight Center for use as an aperture array for a Near-Infrared Spectrometer (NirSpec). The instrument will be carried on the James Webb Space Telescope (JWST), the next generation of space telescope after Hubble Space Telescope retires. The microshutter arrays (MSAs) are designed for the selective transmission of light with high efficiency and high contrast. Arrays are close-packed silicon nitride membranes with a pixel size close to 100x200 &mgr;m. Individual shutters are patterned with a torsion flexure permitting shutters to open 90 degrees with a minimized mechanical stress concentration. Light shields are made on to each shutter for light leak prevention so to enhance optical contrast. Shutters are actuated magnetically, latched and addressed electrostatically. The shutter arrays are fabricated using MEMS bulk-micromachining technologies and packaged using single-sided indium flip-chip bonding technology. The MSA flight concept consists of a mosaic of 2 x 2 format of four fully addressable 365 x 171 arrays placed in the JWST optical path at the focal plane.

Paper Details

Date Published: 3 May 2007
PDF: 13 pages
Proc. SPIE 6556, Micro (MEMS) and Nanotechnologies for Defense and Security, 655602 (3 May 2007); doi: 10.1117/12.721502
Show Author Affiliations
Mary J. Li, NASA Goddard Space Flight Ctr. (United States)
Tomoko Adachi, NASA Goddard Space Flight Ctr. (United States)
Christine Allen, NASA Goddard Space Flight Ctr. (United States)
Sachi Babu, NASA Goddard Space Flight Ctr. (United States)
Sateesh Bajikar, NASA Goddard Space Flight Ctr. (United States)
Michael Beamesderfer, NASA Goddard Space Flight Ctr. (United States)
Ruth Bradley, NASA Goddard Space Flight Ctr. (United States)
Kevin Denis, NASA Goddard Space Flight Ctr. (United States)
Nick Costen, NASA Goddard Space Flight Ctr. (United States)
Audrey Ewin, NASA Goddard Space Flight Ctr. (United States)
Dave Franz, NASA Goddard Space Flight Ctr. (United States)
Larry Hess, NASA Goddard Space Flight Ctr. (United States)
Ron Hu, NASA Goddard Space Flight Ctr. (United States)
Kamili Jackson, NASA Goddard Space Flight Ctr. (United States)
Murzy Jhabvala, NASA Goddard Space Flight Ctr. (United States)
Dan Kelly, NASA Goddard Space Flight Ctr. (United States)
Todd King, NASA Goddard Space Flight Ctr. (United States)
Gunther Kletetschka, NASA Goddard Space Flight Ctr. (United States)
Alexander Kutyrev, NASA Goddard Space Flight Ctr. (United States)
Barney Lynch, NASA Goddard Space Flight Ctr. (United States)
Timothy Miller, NASA Goddard Space Flight Ctr. (United States)
Harvey Moseley, NASA Goddard Space Flight Ctr. (United States)
Vilem Mikula, NASA Goddard Space Flight Ctr. (United States)
Brent Mott, NASA Goddard Space Flight Ctr. (United States)
Lance Oh, NASA Goddard Space Flight Ctr. (United States)
James Pontius, NASA Goddard Space Flight Ctr. (United States)
Dave Rapchun, NASA Goddard Space Flight Ctr. (United States)
Chris Ray, NASA Goddard Space Flight Ctr. (United States)
Knute Ray, NASA Goddard Space Flight Ctr. (United States)
Eric Schulte, NASA Goddard Space Flight Ctr. (United States)
Scott Schwinger, NASA Goddard Space Flight Ctr. (United States)
Peter Shu, NASA Goddard Space Flight Ctr. (United States)
Robert Silverberg, NASA Goddard Space Flight Ctr. (United States)
Wayne Smith, NASA Goddard Space Flight Ctr. (United States)
Steve Snodgrass, NASA Goddard Space Flight Ctr. (United States)
David Sohl, NASA Goddard Space Flight Ctr. (United States)
Leroy Sparr, NASA Goddard Space Flight Ctr. (United States)
Rosalind Steptoe-Jackson, NASA Goddard Space Flight Ctr. (United States)
Veronica Valeriano, NASA Goddard Space Flight Ctr. (United States)
Liqin Wang, NASA Goddard Space Flight Ctr. (United States)
Yun Zheng, NASA Goddard Space Flight Ctr. (United States)
Chris Zincke, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 6556:
Micro (MEMS) and Nanotechnologies for Defense and Security
Thomas George; Zhongyang Cheng, Editor(s)

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